晶圆代工厂TowerJazz和新加坡微电子研究院合作开发MEMS产品

晶圆代工厂TowerJazz日前宣布的新加坡微电子研究院(IME)扩大合作开发8英寸微机电系统(MEMS)芯片的协议。双方合作开发的产品包括惯性传感器、压力传感器以及为第三方MEMS公司开发的硅片集成微反射镜系统等。TowerJazz 表示，双方未来的合作还将扩大到硅通孔(TSV)及先进封装、3维芯片集成、光电子和纳米电子等领域。

TowerJazz taps Singapore’s IME for MEMS development

Hoping to make micro-electro-mechanical systems (MEMS) applications a better revenue stream for TowerJazz, the specialty foundry has touted a technology partnership with Institute of Microelectronics (IME) of Singapore. The institute is known for gelling fabless or fab-lite companies with R&D programs that can quickly transition to foundries for prototyping and possible production.

“IME’s capabilities and experience as an 8-inch (200mm) technology development site for MEMS and ASICs, combined with TowerJazz’s blend of business and technical competency for MEMS and IC fabrication, creates an advantage for our customers by reducing total project cost and time-to-market,” said Zmira Lavie, VP, Process Engineering R&D and GM of Transfer, Development, and Optimization Process Services Business Unit.

TowerJazz said that the collaboration had already yielded ‘outcomes in the areas of inertial sensors, pressure sensors and micromirrors with MEMS product companies,’ without given specific examples.

In the future, TowerJazz claimed that future collaborations could include through-silicon via (TSV) and advanced packaging, 3-dimensional integrated chips, photonics and nanoelectronics.